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Condensed Matter > Mesoscale and Nanoscale Physics

arXiv:2410.01439 (cond-mat)
[Submitted on 2 Oct 2024]

Title:Graphene MEMS and NEMS

Authors:Xuge Fan, Chang He, Jie Ding, Qiang Gao, Hongliang Ma, Max C. Lemme, Wendong Zhang
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Abstract:Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS and sensor applications.
Subjects: Mesoscale and Nanoscale Physics (cond-mat.mes-hall); Materials Science (cond-mat.mtrl-sci); Other Condensed Matter (cond-mat.other); Applied Physics (physics.app-ph)
Cite as: arXiv:2410.01439 [cond-mat.mes-hall]
  (or arXiv:2410.01439v1 [cond-mat.mes-hall] for this version)
  https://doi.org/10.48550/arXiv.2410.01439

Submission history

From: Xuge Fan [view email]
[v1] Wed, 2 Oct 2024 11:42:26 UTC (5,278 KB)
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