CMT-100S(J)(A)(H)(L)
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| 1. Introduction |
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CMT-100S시리즈는 보급형(Academic)모델로 수동 Lever type이며 220X220mmm stage와 Lever를 이용해 측정하고, 본체LCD창을 이용하여 ohm/sq단위로 바로 알 수 있습니다.
(J)모델은 JANDEL Probe 를 장착합니다.
(A)모델은 Motor를 장착하여 버튼 하나로 Contact과 측정을 자동으로 합니다.
(H)모델은 Hot plate를 이용해 샘플의 온도를 조절하며 측정합니다.
(L)은 300mm Wafer을 대응합니다.
CMT-100S시리즈는 제공하는 전용S/W를 이용하여 측정결과를 PC로 실시간 전송가능합니다.
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| 2. Features |
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Lever or Auto contact system |
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Automatic range selection |
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USB port & software |
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| 3. Configuration |
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The system consists of the following components. |
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100S=보급형Probe, 그 외 모델은 JANDEL Probe 채용 |
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Lever or Auto type Z-axis arm |
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Membrane keyboard panel |
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LCD display window |
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USB port for data download |
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Data download Software |
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Standard accessories |
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- Power connection cable
- Data communication cable
- Operating & service manual
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| 4. Specifications |
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Sheet resistance measurement |
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- Measuring method : Contacted by 4-point
probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point |
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Resistivity measurement |
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- Measuring method : Contacted by 4-point probe(Input thickness)
- Measuring range : 10.0 μOhm·cm ∼ 200.0 kOhm·cm (Reference wafer)
- Measuring point : Center 1 point |
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Current source |
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- 10nA to 100mA
- DVM 0V to 2,000mV
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Measurement accuracy |
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- ±0.5 % (Precision resistor) |
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Jandel 4-point probe (100S는 보급형 Probe Head) |
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- Pin spacing : 20 mils∼ 50 mils
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron |
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Software |
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- Windows Version
- Data save & load
- Data export by Excel format & printout
- Use USB port |
| 5. Specimen |
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max 220X220mm ((L)과(H) 모델은 별도사양) |
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| 6. Measuring
time |
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Approx. 2 ± 1 sec/point |
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| 7. Software |
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for Window OS(PC=Option) |
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Connect USB port of PC |
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Data save & load |
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Data printout |
| 8. Utility requirement
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Power requirements |
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- Line voltage : AC 220V ± 10%
- Electric power : 40 W, 500 mA
- Line frequency : 60 Hz |
| 9. Outside dimension |
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250(W)X440(D)X220~350(H)mm ((L)과(H) 모델은 별도사양) |
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| 10. Operating
environment |
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Temperature range : 23°± 1°C |
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Relative humidity : 30 % ∼ 70 % |
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Avoid placing the system near a source of RFI, vibration and sources of gas. |
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Avoid large changes in temperature. |
