"Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time ..."

Yan Qiao, Naiqi Wu, MengChu Zhou (2012)

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DOI: 10.1109/TASE.2012.2192476

access: closed

type: Journal Article

metadata version: 2020-04-02

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation. IEEE Trans Autom. Sci. Eng. 9(3): 564-577 (2012)

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